Ultraviolet Wavefront Sensor

For the wavefront detection of planar wafer surface shapes in the 200-nanometer to 450-nanometer wavelength range, BOJIONG has introduced the Ultraviolet Wavefront Sensor. Utilizing single-path self-interference technology, it does not require a reference beam. Our products and services are extensively used in fields such as optical manufacturing, aerospace, biomedical, and energy research. We are continuously expanding our production capacity, enhancing our technical capabilities, and have established a robust corporate operational framework.

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Product Description

The Ultraviolet Wavefront Sensor, featuring a high phase resolution of 2NM RMS and extremely strong vibration resistance. It also has a resolution of 512×512 pixels (262,144 phase points), capable of performing interference measurements at the rear focal plane. The technology requires the light source to have low coherence and eliminates the need for phase shifting. With the ultraviolet imaging system, the device is capable of real-time wavefront measurement.

Item Specification:

product name	Ultraviolet Wavefront Sensor
Wavelength range	200nm~450nm
Target size	13.3mm×13.3mm
Spatial resolution	26μm
Sampling resolution	512×512（262144pixel）
Phase resolution	＜2nmRMS
Absolute accuracy	10nmRMS
Dynamic range	90μm（256λ）
Sampling rate	32fps
Real-time processing speed	10Hz（Full resolution）
Interface type	USB3.0
Dimension	70mm×46.5mm×68.5mm
Weight	about 240g

Feature Of BOJIONG Ultraviolet Wavefront Sensor

◆UV spectrum 200nm~450nm band

◆Ultra-high resolution of 512×512 (262144) phase points

◆Single-channel light self-interference, no reference light required

◆2nm RMS high phase resolution

◆Just like imaging, easy and fast optical path construction

◆Supports collimated beams and high NA non-collimated beams

◆Extremely strong anti-vibration performance, no need for optical vibration isolation

Application Of BOJIONG Ultraviolet Wavefront Sensor

This BOJIONG Ultraviolet Wavefront Sensor used for optical system aberration measurement, optical system calibration, flat (wafer) surface shape measurement, optical spherical surface shape measurement, etc.

Laser beam wavefront detection

Wavefront detection response of adaptive optics Zernike mode

Example of aberration measurement of optical system

Optical system calibration measurement examples

Example of wafer surface roughness measurement

Micro etching morphology measurement - defect sample 1 # -114 lines

BOJIONG Ultraviolet Wavefront Sensor Details

BOJIONG Ultraviolet Wavefront Sensor developed by a team of professors from Zhejiang University and Nanyang Technological University of Singapore, with domestic patented technology, it combines diffraction and interference to achieve a common four-wave transverse shear interference, with superior detection sensitivity and anti-vibration performance, and can realize real-time and high-speed dynamic interferometry without vibration isolation. The real-time measurement shows a frame rate of more than 10 frames. At the same time, the FIS4 sensor has an ultra-high phase resolution of 512×512 (260,000 phase points), the measurement band covers 200nm~15μm, the measurement sensitivity reaches 2nm, and the measurement repeatability is better than 1/1000λ (RMS). It can be used for laser beam quality analysis, plasma flow field detection, real-time measurement of high-speed flow field distribution, image quality evaluation of optical system, microscopic profile measurement and quantitative phase imaging of biological cells.

FIS4 Technical parameters of each series of products

Product	FIS4-UV	FIS4-HR	FIS4-UHR	FIS4-HS	FIS4-Cell	FIS4-NIR
Wavelength range	200~450nm	400~1100nm	400~1100nm	400~1100nm	400~1100nm	900~1200nm
Target size mm2	13.3×13.3	7.07×7.07	13.3×13.3	10.24×10.24	7.07×7.07	13.3×13.3
Spatial resolution	26μm	23.6μm	26μm	24.4μm	23.6μm	26μm
Image pixel	-	2048×2048	-	-	2048×2048	-
Phase output resolution	512×512 （262144pixel）	300×300（90000pixel）	512×512（262144pixel）	420×420（176400pixel）	300×300（90000pixel）	512×512（262144pixel）
Phase resolution	＜2nmRMS	＜2nmRMS	＜2nmRMS	＜2nmRMS	＜2nmRMS	＜2nmRMS
Absolute accuracy	10nmRMS	10nmRMS	15nmRMS	10nmRMS	10nmRMS	15nmRMS
Dynamic range	90μm （256λ）	110μm （150λ）	162μm （256λ）	132μm （210λ）	110μm （150λ）	270μm （256λ）
Sampling rate	32fps	24fps	45fps	107fps	24fps	45fps
Real-time processing speed	10Hz (Full resolution)	10Hz (Full resolution)	10Hz (Full resolution)	10Hz (Full resolution)Supports delayed batch processing	10Hz (Full resolution)	10Hz (Full resolution)
Interface type	USB3.0	GIGE	USB3.0	GIGE	GIGE	USB3.0
External interface	-	-	-	-	C port	-
Size mm2	70x46.5x68.5	56.5x43x41.5	70x46.5x68.5	56.5x43x41.5	56.5x43x41.5	70x46.5x68.5
weight	about240g	about120g	about240g	about120g	about120g	about240g

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Contact Info

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Address

No. 578 Yingkou Road, Yangpu District, Shanghai, China
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Tel

+86-021-56729166
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E-mail

tom.he@shbojiong.com

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