For applications such as femtosecond laser and flow field analysis, BOJIONG has specially developed an Ultra High-speed Wavefront Analyzer that performs interference at the rear focal plane. It has low requirements for the coherence of the light source and does not require phase shifting. Ordinary imaging systems can be used to achieve interferometric measurements. The device features ultra-high vibration resistance, ultra-high stability, ultra-high-speed imaging capabilities, and the ability to achieve nano-level precision measurements without the need for vibration isolation.
|
Product name |
Ultra High-speed Wavefront Analyzer |
|
Wavelength range |
400nm~1100nm |
|
Target size |
10.24mm×10.24mm |
|
Spatial resolution |
24.4μm |
|
Sampling resolution |
420×420（176400pixel） |
|
Phase resolution |
＜2nmRMS |
|
Absolute accuracy |
10nmRMS |
|
Dynamic range |
132μm（210λ） |
|
Sampling rate |
107fps |
|
Real-time processing speed |
10Hz（Full resolution） |
|
Interface type |
Supports delayed batch processing |
|
Dimension |
GIGE |
|
Weight |
56.5mm×43mm×41.5mm |
|
Wavelength range |
about 120g |
◆Sampling frame rate up to 107fps
◆Broad spectrum 400nm~1100nm band
◆Ultra-high resolution of 420×420 (176400) phase points
◆Single-channel light self-interference, no reference light required
◆2nm RMS high phase resolution
◆Extremely strong anti-vibration performance, no need for optical vibration isolation
◆Just like imaging, easy and fast optical path construction
◆Supports collimated beams and large NA converged beams
This BOJIONG Ultra High-speed Wavefront Analyzerused in wafer surface roughness detection, silicon-based and glass substrate micro-morphology measurement, aerodynamic optics, high-speed flow field, gas plasma density measurement
|
laser beam wavefront detection |
Optical planar surface shape measurement |
|
Example of wafer surface roughness measurement |
Reconstructed wavefront graph measurement example |
|
Gas plasma density measurement optical path |
|
BOJIONG Ultra High-speed Wavefront Analyzer developed by a team of professors from Zhejiang University and Nanyang Technological University of Singapore, with domestic patented technology, it combines diffraction and interference to achieve a common four-wave transverse shear interference, with superior detection sensitivity and anti-vibration performance, and can realize real-time and high-speed dynamic interferometry without vibration isolation. The real-time measurement shows a frame rate of more than 10 frames. At the same time, the FIS4 sensor has an ultra-high phase resolution of 512×512 (260,000 phase points), the measurement band covers 200nm~15μm, the measurement sensitivity reaches 2nm, and the measurement repeatability is better than 1/1000λ (RMS). It can be used for laser beam quality analysis, plasma flow field detection, real-time measurement of high-speed flow field distribution, image quality evaluation of optical system, microscopic profile measurement and quantitative phase imaging of biological cells.
|
FIS4 Technical parameters of each series of products |
||||||
|
|
|
|
|
|
|
|
|
Product |
FIS4-UV |
FIS4-HR |
FIS4-UHR |
FIS4-HS |
FIS4-Cell |
FIS4-NIR |
|
Wavelength range |
200~450nm |
400~1100nm |
400~1100nm |
400~1100nm |
400~1100nm |
900~1200nm |
|
Target size mm² |
13.3×13.3 |
7.07×7.07 |
13.3×13.3 |
10.24×10.24 |
7.07×7.07 |
13.3×13.3 |
|
Spatial resolution |
26μm |
23.6μm |
26μm |
24.4μm |
23.6μm |
26μm |
|
Image pixel |
- |
2048×2048 |
- |
- |
2048×2048 |
- |
|
Phase output resolution |
512×512 （262144pixel） |
300×300（90000pixel） |
512×512（262144pixel） |
420×420（176400pixel） |
300×300（90000pixel） |
512×512（262144pixel） |
|
Phase resolution |
＜2nmRMS |
＜2nmRMS |
＜2nmRMS |
＜2nmRMS |
＜2nmRMS |
＜2nmRMS |
|
Absolute accuracy |
10nmRMS |
10nmRMS |
15nmRMS |
10nmRMS |
10nmRMS |
15nmRMS |
|
Dynamic range |
90μm （256λ） |
110μm （150λ） |
162μm （256λ） |
132μm （210λ） |
110μm （150λ） |
270μm （256λ） |
|
Sampling rate |
32fps |
24fps |
45fps |
107fps |
24fps |
45fps |
|
Real-time processing speed |
10Hz (Full resolution) |
10Hz (Full resolution) |
10Hz (Full resolution) |
10Hz (Full resolution)Supports delayed batch processing |
10Hz (Full resolution) |
10Hz (Full resolution) |
|
Interface type |
USB3.0 |
GIGE |
USB3.0 |
GIGE |
GIGE |
USB3.0 |
|
External interface |
- |
- |
- |
- |
C port |
- |
|
Size mm² |
70x46.5x68.5 |
56.5x43x41.5 |
70x46.5x68.5 |
56.5x43x41.5 |
56.5x43x41.5 |
70x46.5x68.5 |
|
weight |
about240g |
about120g |
about240g |
about120g |
about120g |
about240g |
Address
No. 578 Yingkou Road, Yangpu District, Shanghai, China
Tel
