This ultraviolet wavefront analyzer, boasting a resolution of 512×512 pixels (262,144 phase points), is capable of performing interference measurements at the rear focal plane. The technology requires a low coherence level from the light source and eliminates the need for phase shifting. With the ultraviolet imaging system, the device can achieve real-time wavefront measurement. It features exceptional vibration resistance and stability, enabling nanometer-level measurement accuracy without the need for vibration isolation facilities.
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Product name |
Ultraviolet Wavefront Analyzer |
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Wavelength range |
200nm~450nm |
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Target size |
13.3mm×13.3mm |
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Spatial resolution |
26μm |
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Sampling resolution |
512×512（262144pixel） |
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Phase resolution |
＜2nmRMS |
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Absolute accuracy |
10nmRMS |
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Dynamic range |
90μm（256λ） |
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Sampling rate |
32fps |
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Real-time processing speed |
10Hz（Full resolution） |
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Interface type |
USB3.0 |
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Dimension |
70mm×46.5mm×68.5mm |
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Weight |
about 240g |
◆2nm RMS high phase resolution
◆UV spectrum 200nm~450nm band
◆Ultra-high resolution of 512×512 (262144) phase points
◆Single-channel light self-interference, no reference light required
◆Extremely strong anti-vibration performance, no need for optical vibration isolation
◆Just like imaging, easy and fast optical path construction
◆Supports collimated beams and high NA non-collimated beams
This BOJIONG Ultraviolet Wavefront Analyzer used for optical system aberration measurement, optical system calibration, flat (wafer) surface shape measurement, optical spherical surface shape measurement, etc.
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Laser beam wavefront detection |
Wavefront detection response of adaptive optics Zernike mode |
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Example of aberration measurement of optical system |
Optical system calibration measurement examples |
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Example of wafer surface roughness measurement |
Micro etching morphology measurement - defect sample 1 # -114 lines |
BOJIONG Ultraviolet Wavefront Analyzer developed by a team of professors from Zhejiang University and Nanyang Technological University of Singapore, with domestic patented technology, it combines diffraction and interference to achieve a common four-wave transverse shear interference, with superior detection sensitivity and anti-vibration performance, and can realize real-time and high-speed dynamic interferometry without vibration isolation. The real-time measurement shows a frame rate of more than 10 frames. At the same time, the FIS4 sensor has an ultra-high phase resolution of 512×512 (260,000 phase points), the measurement band covers 200nm~15μm, the measurement sensitivity reaches 2nm, and the measurement repeatability is better than 1/1000λ (RMS). It can be used for laser beam quality analysis, plasma flow field detection, real-time measurement of high-speed flow field distribution, image quality evaluation of optical system, microscopic profile measurement and quantitative phase imaging of biological cells.
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FIS4 Technical parameters of each series of products |
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Product |
FIS4-UV |
FIS4-HR |
FIS4-UHR |
FIS4-HS |
FIS4-Cell |
FIS4-NIR |
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Wavelength range |
200~450nm |
400~1100nm |
400~1100nm |
400~1100nm |
400~1100nm |
900~1200nm |
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Target size mm² |
13.3×13.3 |
7.07×7.07 |
13.3×13.3 |
10.24×10.24 |
7.07×7.07 |
13.3×13.3 |
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Spatial resolution |
26μm |
23.6μm |
26μm |
24.4μm |
23.6μm |
26μm |
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Image pixel |
- |
2048×2048 |
- |
- |
2048×2048 |
- |
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Phase output resolution |
512×512 （262144pixel） |
300×300（90000pixel） |
512×512（262144pixel） |
420×420（176400pixel） |
300×300（90000pixel） |
512×512（262144pixel） |
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Phase resolution |
＜2nmRMS |
＜2nmRMS |
＜2nmRMS |
＜2nmRMS |
＜2nmRMS |
＜2nmRMS |
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Absolute accuracy |
10nmRMS |
10nmRMS |
15nmRMS |
10nmRMS |
10nmRMS |
15nmRMS |
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Dynamic range |
90μm （256λ） |
110μm （150λ） |
162μm （256λ） |
132μm （210λ） |
110μm （150λ） |
270μm （256λ） |
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Sampling rate |
32fps |
24fps |
45fps |
107fps |
24fps |
45fps |
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Real-time processing speed |
10Hz (Full resolution) |
10Hz (Full resolution) |
10Hz (Full resolution) |
10Hz (Full resolution)Supports delayed batch processing |
10Hz (Full resolution) |
10Hz (Full resolution) |
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Interface type |
USB3.0 |
GIGE |
USB3.0 |
GIGE |
GIGE |
USB3.0 |
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External interface |
- |
- |
- |
- |
C port |
- |
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Size mm² |
70x46.5x68.5 |
56.5x43x41.5 |
70x46.5x68.5 |
56.5x43x41.5 |
56.5x43x41.5 |
70x46.5x68.5 |
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weight |
about240g |
about120g |
about240g |
about120g |
about120g |
about240g |
Address
No. 578 Yingkou Road, Yangpu District, Shanghai, China
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