Ultraviolet Four-wave Interferometric Sensor

BOJIONG Optoelectronics has always been dedicated to wavefront interference detection technology, and now introduces a new generation of Ultraviolet Four-wave Interferometric Sensors, providing excellent solutions for universities and research institutes. Our products and services are widely used in optical manufacturing, aerospace, biomedical, and energy research, helping customers conduct precise measurements and analyses of optical performance to improve product quality and production efficiency. In recent years, we have continuously expanded our production scale, strengthened our technical capabilities, and established a comprehensive corporate operating mechanism. BOJIONG sincerely invites customers from both domestic and international markets to collaborate with us to achieve brilliance together.

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Product Description

The Ultraviolet Four-wave Interferometric Sensor incorporates our proprietary technology of randomized coding four-wave diffraction, enabling interference at the back focal plane with minimal requirements for the coherence of the light source, thus eliminating the need for phase shifting. Through the ultraviolet imaging system, the sensor is capable of real-time wavefront measurement, exhibiting excellent vibration resistance and stability, and can achieve nanometer-level precision measurements even without the use of vibration isolation. BOJIONG Optoelectronics is poised to redefine the standards for optical performance measurement and analysis, leading the industry into a new era of precision and efficiency.

Item Specification

Product name	Ultraviolet Four-wave Interferometric Sensor
Wavelength range	200nm~450nm
Target size	13.3mm×13.3mm
Spatial resolution	26μm
Sampling resolution	512×512（262144pixel）
Phase resolution	＜2nmRMS
Absolute accuracy	10nmRMS
Dynamic range	90μm（256λ）
Sampling rate	32fps
Real-time processing speed	10Hz（Full resolution）
Interface type	USB3.0
Dimension	70mm×46.5mm×68.5mm
Weight	about 240g

Feature Of BOJIONG Ultraviolet Four-wave Interferometric Sensor

◆UV spectrum 200nm~450nm band

◆Ultra-high resolution of 512×512 (262144) phase points

◆Single-channel light self-interference, no reference light required

◆2nm RMS high phase resolution

◆Extremely strong anti-vibration performance, no need for optical vibration isolation

◆Just like imaging, easy and fast optical path construction

◆Supports collimated beams and high NA non-collimated beams

Application Of BOJIONG Ultraviolet Four-wave Interferometric Sensor

This BOJIONG Ultraviolet Four-wave Interferometric Sensor used for optical system aberration measurement, optical system calibration, flat (wafer) surface shape measurement, optical spherical surface shape measurement, etc.

Laser beam wavefront detection

Wavefront detection response of adaptive optics Zernike mode

Example of aberration measurement of optical system

Optical system calibration measurement examples

Example of wafer surface roughness measurement

Micro etching morphology measurement - defect sample 1 # -114 lines

BOJIONG Ultraviolet Four-wave Interferometric Sensor Details

BOJIONG Ultraviolet Four-wave Interferometric Sensor developed by a team of professors from Zhejiang University and Nanyang Technological University of Singapore, with domestic patented technology, it combines diffraction and interference to achieve a common four-wave transverse shear interference, with superior detection sensitivity and anti-vibration performance, and can realize real-time and high-speed dynamic interferometry without vibration isolation. The real-time measurement shows a frame rate of more than 10 frames. At the same time, the FIS4 sensor has an ultra-high phase resolution of 512×512 (260,000 phase points), the measurement band covers 200nm~15μm, the measurement sensitivity reaches 2nm, and the measurement repeatability is better than 1/1000λ (RMS). It can be used for laser beam quality analysis, plasma flow field detection, real-time measurement of high-speed flow field distribution, image quality evaluation of optical system, microscopic profile measurement and quantitative phase imaging of biological cells.

FIS4 Technical parameters of each series of products

Product	FIS4-UV	FIS4-HR	FIS4-UHR	FIS4-HS	FIS4-Cell	FIS4-NIR
Wavelength range	200~450nm	400~1100nm	400~1100nm	400~1100nm	400~1100nm	900~1200nm
Target size mm²	13.3×13.3	7.07×7.07	13.3×13.3	10.24×10.24	7.07×7.07	13.3×13.3
Spatial resolution	26μm	23.6μm	26μm	24.4μm	23.6μm	26μm
Image pixel	-	2048×2048	-	-	2048×2048	-
Phase output resolution	512×512 （262144pixel）	300×300（90000pixel）	512×512（262144pixel）	420×420（176400pixel）	300×300（90000pixel）	512×512（262144pixel）
Phase resolution	＜2nmRMS	＜2nmRMS	＜2nmRMS	＜2nmRMS	＜2nmRMS	＜2nmRMS
Absolute accuracy	10nmRMS	10nmRMS	15nmRMS	10nmRMS	10nmRMS	15nmRMS
Dynamic range	90μm （256λ）	110μm （150λ）	162μm （256λ）	132μm （210λ）	110μm （150λ）	270μm （256λ）
Sampling rate	32fps	24fps	45fps	107fps	24fps	45fps
Real-time processing speed	10Hz (Full resolution)	10Hz (Full resolution)	10Hz (Full resolution)	10Hz (Full resolution)Supports delayed batch processing	10Hz (Full resolution)	10Hz (Full resolution)
Interface type	USB3.0	GIGE	USB3.0	GIGE	GIGE	USB3.0
External interface	-	-	-	-	C port	-
Size mm²	70x46.5x68.5	56.5x43x41.5	70x46.5x68.5	56.5x43x41.5	56.5x43x41.5	70x46.5x68.5
weight	about240g	about120g	about240g	about120g	about120g	about240g

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Contact Info

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Address

No. 578 Yingkou Road, Yangpu District, Shanghai, China
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Tel

+86-021-56729166
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E-mail

tom.he@shbojiong.com

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