Bojiong (Shanghai) Precision Machinery Technology Co., Ltd
Bojiong (Shanghai) Precision Machinery Technology Co., Ltd
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High-resolution wavefront sensor - Introduction to FIS4-HR high-resolution four-wave interferometer sensor

Developed specifically for convenient interferometric measurement in industry, scientific research, and national defense. High resolution of 300×300 (90,000) phase points, 400-1100nm wide spectral response, 10 frames of full-resolution real-time 3D result display, providing an ideal wavefront sensing measurement tool for laser beam wavefront detection, adaptive optics, optical system calibration, optical window detection, optical plane surface shape, spherical surface shape measurement, surface roughness, surface micro-contour detection, etc.


FIS4 HR high-resolution four-wave interferometer sensor uses patented random coded four-wave diffraction technology to achieve single-channel measured wavefront self-interference, and interference occurs at the rear image plane position. It has low requirements on the coherence of the light source, does not require phase shifting, and can achieve interferometric measurement using an ordinary imaging system. It has ultra-high vibration resistance and ultra-high stability, and can achieve nm-level precision measurement without vibration isolation. Compared with the microlens array Hartmann sensor, it has more high-resolution phase points, a wider adaptive band range, a larger dynamic range, and better cost performance.

Main features

◆ High resolution of 300×300 (90,000) phase points

◆ Single-path light self-interference, no reference mirror required

◆ Wide spectrum 400nm~1100nm band

◆ 2nm RMS high phase resolution

◆ Extremely strong vibration resistance, no need for optical vibration isolation

◆ Simple and fast interference light path construction

◆ Supports collimated beams and large NA converging beams


Product applications

Laser beam wavefront detection, adaptive optics, plane surface measurement, optical system calibration, optical window detection, optical plane, spherical surface measurement, surface roughness detection.


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